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・ Prochoreutis arisema
・ Prochoreutis atrox
・ Prochoreutis bella
・ Prochoreutis brunescens
・ Process theology
・ Process theory
・ Process theory of composition
・ Process tomography
・ Process tracing
・ Process trailer
・ Process validation
・ Process variable
・ Process variation (semiconductor)
・ Process Vision
・ Process Vision (Dutch company)
Process window
・ Process Window Index
・ Process-based management
・ Process-centered design
・ Process-data diagram
・ Process-driven application
・ Process-oriented programming
・ Process-oriented psychology
・ Process.h
・ Processability theory
・ Processed Beats
・ Processed Book Project
・ Processed cheese
・ Processed meat
・ Processed Vegetable Growers' Association


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Process window : ウィキペディア英語版
Process window
The process window is a graph with a range of parameters for a specific manufacturing process yields a defined result. Typically multiple parameters are plotted in such a graph with a central region where the process behaves well, while the outer borders define regions where the process becomes unstable or returns an unfavourable result. A statistical evaluation of the process performance is further performed by the calculation of the associated Process Window Index.
==Applications==
Typical applications are found in photolithography where the response of a photoresist to parameters like temperature, radiation intensity, critical dimension and sidewall angle of the structures, etc. are plotted versus an optical parameter such as the numerical aperture to optimize the design of an exposure tool or to achieve a reproducible result and high yield.

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
ウィキペディアで「Process window」の詳細全文を読む



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